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Semiconductor International is a technical/business publication covering the global semiconductor manufacturing industry. It serves the needs of semiconductor engineers and suppliers through a wide range of products and services including magazines, directories, trade show guides, newsletters, specialized supplements, original research, industry seminars and awards.

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Read the Digital Issue: Semiconductor International, June 2009

COVER STORY
How CD-SEMs Complement Scatterometry
Like competing Siamese twins, CD-SEM and scatterometry enable and push each other to higher levels of capabilities and evolving applications.

Ever since scatterometry became available to IC manufacturers, it has competed with CD-scanning electron microscopy (CD-SEM), with each technology continuously improving.

From a roadmap perspective, this competition has yielded good results. A CD-SEM can now analyze a couple of lines and get the critical dimension (CD); it is progressing toward simultaneously analyzing several lines, which scatterometry already does, and both techniques are getting faster. ...

FEATURES
Emerging Trends in Advanced Packaging
Control Strategy for Wafer-Edge Defects
Testing Multi-Functional Power Management ICs

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